An investigation of the spectral lines of argon discharge with Low electron density

In this paper, the emission lines from argon gas are investigated to diagnose some properties of discharge. The branching fraction values calculated from the theoretical data obtained from National Institute of Standards and Technology (NIST) and the experimental data measured via optical emission spectroscopy (OES) have been compared. Line ratio model has been proposed for argon discharge with low electron density at low pressure. Electron temperature was calculated using the data evaluated from the OES, and also measured using Langmuir probe. OES data have been compared with Langmuir probe measurements. The electron energy distribution function and electron density obtained from probe have been evaluated.