TDSTEPS: Two-dimensional Semiconductor Technology Process Simulator

Development of two-dimensional Integrated Circuit Technology Process Simulator for Silicon Technology has been discussed in this paper. This simulator has been developed under a programme called two-dimensional Semiconductor Technology Process Simulator, sponsored by the Department of Electronics, India. This paper discusses about the results obtained after the simulation of unit processes as well as various integrated process steps involved in the complete fabrication of a device which may be either discrete or integrated circuit. It works only for low voltage devices which are used in conventional devices having junction depth less or equal to 5 mu m.