Fractal Pull-in Stability Theory for Microelectromechanical Systems

被引：35
|
作者：
Tian, Dan [1 ]
He, Chun-Hui [2 ]
He, Ji-Huan [3 ,4 ]
机构：
[1] Xian Univ Architecture & Technol, Sch Sci, Xian, Peoples R China
[2] Xian Univ Architecture & Technol, Sch Civil Engn, Xian, Peoples R China
[3] Henan Polytech Univ, Sch Math & Informat Sci, Jiaozuo, Henan, Peoples R China
[4] Soochow Univ, Coll Text & Clothing Engn, Natl Engn Lab Modern Silk, Suzhou, Peoples R China
来源：
FRONTIERS IN PHYSICS | 2021年 / 9卷
关键词：
micro-electromechanical systems; pull-in; fractal space; porous medium; fractal derivative;
D O I：
10.3389/fphy.2021.606011
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Pull-in instability was an important phenomenon in microelectromechanical systems (MEMS). In the past, MEMS were usually assumed to work in an ideal environment. But in the real circumstances, MEMS often work in dust-filled air, which is equivalent to working in porous media, that's mean fractal space. In this paper, we studied MEMS in fractal space and established the corresponding model. At the same time, we can control the occurrence time and stable time of pull-in by adjusting the value of the fractal index, and obtain a stable pull-in phenomenon.
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页数：4
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