Light-induced reversible conductivity changes in silicon-on-insulator nanowires

被引:13
|
作者
Francinelli, A
Tonneau, D
Clément, N
Abed, H
Jandard, F
Nitsche, S
Dallaporta, H
Safarov, V
Gautier, J
机构
[1] Fac Sci Luminy, GPEC, F-13288 Marseille 09, France
[2] CEA, GRE Grenoble, DRT LETI, D2NT, F-38054 Grenoble, France
关键词
D O I
10.1063/1.1830082
中图分类号
O59 [应用物理学];
学科分类号
摘要
Silicon-on-insulator (SOI) samples are preferred for extention of the metal-oxide-silicon technology. Here, we report a reversible change in electrical conductivity in dark conditions of a 20-nm-thick SOI layer, induced by illumination. In spite of some similarities with the Staebler-Wronski effect in hydrogenated amorphous silicon, we point out important differences such as the crystalline nature of our silicon film, the lack of hydrogen and a much shorter relaxation time at ambient temperature. This time can even be reduced by application of a vertical electric field. We suggest that interface traps play a major role in this mechanism. Finally, we noticed a conductivity change between ambient light and dark conditions. (C) 2004 American Institute of Physics.
引用
收藏
页码:5272 / 5274
页数:3
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