Planar waveguide devices on a silicon compatible technology platform

被引：0

作者：

Wörhoff, K ^{[1
]}

Lambeck, PV ^{[1
]}

Klunder, DJW ^{[1
]}

de Ridder, RM ^{[1
]}

Heideman, RG ^{[1
]}

Roeloffzen, CGH ^{[1
]}

Hussein, GM ^{[1
]}

Musa, S ^{[1
]}

van Weerden, HJ ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, Dept Appl Phys, NL-7500 AE Enschede, Netherlands

来源：

INTEGRATED OPTOELECTRONICS, PROCEEDINGS | 2002年 / 2002卷 / 04期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silicon compatible technology platform based on silicon oxynitride thin film technology is discussed. This platform allows for various passive and active integrated optics applications in the fields of optical communication and sensing. In this approach, the basic building block is an optimized silicon oxynitride waveguide channel with excellent (optical) properties (e.g.: low loss, tunable refractive index contrast, highly uniform and reliable layer deposition). Since silicon oxynitride is intrinsically a passive material, this technology is combined with other materials, yielding active functionality (e.g.: erbium-doped optical amplifier materials, electro-optical materials such as zinc oxide or polymers, etc.). Amongst others, we will demonstrate and discuss the performance of a few integrated optical devices that have been realized on the basis of this hybrid approach.

引用

页码：279 / 312

页数：34

共 50 条

[1] Low temperature silicon oxinitride technology for compact CMOS compatible planar optical devices
Bayat, Khadijeh
Chaudhuri, Sujeet K.
Safavi-Naeini, Saffiedin
2007 THE JOINT INTERNATIONAL CONFERENCE ON OPTICAL INTERNET AND AUSTRALIAN CONFERENCE ON OPTICAL FIBRE TECHNOLOGY, 2007, : 169 - 171
[2] Toward a novel planar circuit compatible silicon micromachined waveguide
Becker, James P.
Katehi, Linda P.B.
IEEE Topical Meeting on Electrical Performance of Electronic Packaging, 1999, : 221 - 224
[3] Progress and technical challenge for planar waveguide devices: silica and silicon waveguides
Okamoto, Katsunari
LASER & PHOTONICS REVIEWS, 2012, 6 (01) : 14 - 23
[4] Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications
Su, Yikai
Zhang, Yong
Qiu, Ciyuan
Guo, Xuhan
Sun, Lu
ADVANCED MATERIALS TECHNOLOGIES, 2020, 5 (08)
[5] Integrated photonic devices based on silicon photonic wire waveguide platform
Yamada, Koji
Fukuda, Hiroshi
Tsuchizawa, Tai
Watanabe, Toshifumi
Shinojima, Hiroyuki
Nishi, Hidetaka
Park, Songbong
Ishikawa, Yasuhiko
Wada, Kazumi
Itabashi, Sei-ichi
SILICON PHOTONICS V, 2010, 7606
[6] Packaging of waveguide devices based on bulk silicon MEMS technology
Liu, Dongdong
Hu, Haibo
Tang, Yanzhe
Ding, Chun
Wang, Yuelin
Journal of Mechanical Strength, 2001, 23 (04) : 531 - 534
[7] Functional planar waveguide devices
Okamoto, K
OPTICAL NETWORKING, 1999, : 129 - 140
[8] Label-free biosensing using silicon planar waveguide technology
Densmore, A.
Xu, D. -X.
Waldron, P.
Janz, S.
Delage, A.
Lopinski, G.
Mischki, T.
Cheben, P.
Post, E.
Lapointe, J.
Schmid, J. H.
PHOTONICS NORTH 2007, PTS 1 AND 2, 2007, 6796
[9] Fiber-to-waveguide evanescent coupler for planar integration of silicon optoelectronic devices
Lu, ZL
Yao, P
Venkataraman, S
Pustai, D
Lin, CC
PHOTONICS PACKAGING AND INTEGRATION IV, 2004, 5358 : 102 - 110
[10] IC compatible planar inductors on silicon
Ronkainen, H
Kattelus, H
Tarvainen, E
Riihisaari, T
Andersson, M
Kuivalainen, P
IEE PROCEEDINGS-CIRCUITS DEVICES AND SYSTEMS, 1997, 144 (01): : 29 - 35

← 1 2 3 4 5 →