Contactless measurement of thin film conductivity by a microwave compact equipment

被引：0

作者：

Ju, Y ^{[1
]}

Hirosawa, Y ^{[1
]}

Saka, M ^{[1
]}

Abé, H ^{[1
]}

机构：

[1] Tohoku Univ, Dept Mech Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2003年 / 17卷 / 8-9期

关键词：

D O I：

10.1142/S021797920301985X

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method for contactless measurement of the conductivity of thin conducting film was demonstrated. In order to apply the technique to on-line testing, a large standoff distance of 35 mm was obtained by using a reflector focusing sensor. The measurement was preformed by using a microwave compact equipment working at 94 GHz which was developed for decreasing the system cost. Indium Tin Oxide films having conductivity of 8.2x10(4)-6.6x10(5) S/m on the glass substrates were used as the samples. Evaluation equation for determining the conductivity of Indium Tin Oxide films was generated.

引用

页码：1904 / 1909

页数：6

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