Microcrystalline silicon for large area thin film solar cells

被引：150
|
作者：
Rech, B [1 ]
Roschek, T [1 ]
Repmann, T [1 ]
Müller, J [1 ]
Schmitz, R [1 ]
Appenzeller, W [1 ]
机构：
[1] Forschungszentrum Julich GmbH, Inst Photovolta, D-52425 Julich, Germany
来源：
THIN SOLID FILMS | 2003年 / 427卷 / 1-2期
关键词：
microcrystalline silicon; solar cell; PECVD; high rate; tandem cell; up-scaling;
D O I：
10.1016/S0040-6090(02)01210-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We present a comprehensive study of microcrystalline silicon (muc-Si:H) solar cells prepared by plasma-enhanced chemical vapour deposition (PECVD) at 13.56 MHz excitation frequency. In the first step the cell development was performed in a small area PECVD reactor showing the relationship between the deposition process parameters and the resulting solar cell performance. Focus was on the influence of deposition pressure, electrode distance and the application of a pulsed plasma on high rate deposition of solar cells. Subsequent up-scaling to a substrate area of 30 X 30 cm(2) confirmed the suitability of the process for large area reactors. The influence of i-layer deposition parameters on solar cell performance was studied directly in p-i-n cells prepared on textured ZnO. Solar cell efficiencies up to 9% were achieved at deposition rates of 5-6 Angstrom/s for the i-layer using high plasma powers. Applied as bottom cell in a-Si:H/muc-Si:H tandem cells a stable cell efficiency of 11.2% could be obtained. The excellent homogeneity was proven by the realization of first modules with an aperture area of 689 cm(2) and an active area initial efficiency of 10.3% (stable: 8.9%) using an established base technology for laser patterning and back contact sputtering at RWE Solar GmbH. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：157 / 165
页数：9
相关论文
共 50 条
  • [1] Large area deposition of intrinsic microcrystalline silicon for thin film solar cells
    Repmann, T
    Appenzeller, W
    Roschek, T
    Rech, B
    Wagner, H
    [J]. CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, : 912 - 915
  • [2] Microcrystalline bottom cells in large area thin film silicon MICROMORPH™ solar modules
    Hoetzel, J. E.
    Caglar, O.
    Cashmore, J. S.
    Goury, C.
    Kalas, J.
    Klindworth, M.
    Kupich, M.
    Leu, G. -F.
    Lindic, M. -H.
    Losio, P. A.
    Mates, T.
    Mereu, B.
    Roschek, T.
    Sinicco, I.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2016, 157 : 178 - 189
  • [3] Production equipment for large area deposition of amorphous and microcrystalline silicon thin-film solar cells
    Repmann, T.
    Wieder, S.
    Klein, S.
    Stiebig, H.
    Rech, B.
    [J]. CONFERENCE RECORD OF THE 2006 IEEE 4TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, VOLS 1 AND 2, 2006, : 1724 - +
  • [4] Microcrystalline silicon thin-film solar cells
    Hayakawa, Takashi
    Nasuno, Yoshiyuki
    Kondo, Michio
    Matsuda, Akihisa
    [J]. Shapu Giho/Sharp Technical Journal, 2002, (83): : 45 - 48
  • [5] Characterization of microcrystalline silicon thin-film solar cells
    Brammer, T
    Stiebig, H
    [J]. CONFERENCE RECORD OF THE TWENTY-NINTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE 2002, 2002, : 1274 - 1277
  • [6] Silicontetrachloride based microcrystalline silicon for application in thin film silicon solar cells
    Lejeune, M
    Beyer, W
    Carius, R
    Müller, J
    Rech, B
    [J]. THIN SOLID FILMS, 2004, 451 : 280 - 284
  • [7] Microcrystalline silicon carbide window layers in thin film silicon solar cells
    Chen, T.
    Huang, Y.
    Dasgupta, A.
    Luysberg, M.
    Houben, L.
    Yang, D.
    Carius, R.
    Finger, F.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2012, 98 : 370 - 378
  • [8] Amorphous Silicon, Microcrystalline Silicon, and Thin-Film Polycrystalline Silicon Solar Cells
    Ruud E. I. Schropp
    Reinhard Carius
    Guy Beaucarne
    [J]. MRS Bulletin, 2007, 32 : 219 - 224
  • [9] Amorphous silicon, microcrystalline silicon, and thin-film polycrystalline silicon solar cells
    Schropp, Ruud E. I.
    Carius, Reinhard
    Beaucarne, Guy
    [J]. MRS BULLETIN, 2007, 32 (03) : 219 - 224
  • [10] Passivated interfaces in fluorinated microcrystalline silicon thin film solar cells
    Stuckelberger, J.
    Haenni, S.
    Niesen, B.
    Haug, F. -J.
    Ballif, C.
    [J]. 2015 IEEE 42ND PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2015,
12345