Internal Stresses and Structure of Multilayer Coatings on the Basis of Zr-Y-O/Si-Al-N

被引：3
|
作者：
Fedorischeva, Marina V. [1 ]
Sergeev, Victor P. [1 ]
Kalashnikov, Mark P. [1 ]
Voronov, Andrei V. [1 ]
机构：
[1] Inst Strength Phys & Mat Sci SB RAS, Tomsk 634055, Russia
来源：
INTERNATIONAL CONFERENCE ON PHYSICAL MESOMECHANICS OF MULTILEVEL SYSTEMS 2014 | 2014年 / 1623卷
关键词：
internal stresses; microstructure; multilayer heat-shielding coatings; curvature-torsion; grain size; magnetron deposition; phase composition; MICROSTRUCTURE;
D O I：
10.1063/1.4898904
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.
引用
收藏
页码：147 / 150
页数：4
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