A Novel 6 MHz Phased Array Piezoelectric Micromachined Ultrasound Transducer (pMUT) with 128 Elements for Medical Imaging

被引：2

作者：

Sadeghpour, Sina ^{[1
]}

Zilonova, Ekatrina ^{[2
]}

D'Hooge, Jan ^{[2
]}

Kraft, Michael ^{[1
]}

机构：

[1] Katholieke Univ Leuven, Dept Elect Engn ESAT MNS, Leuven, Belgium

[2] Katholieke Univ Leuven, Dept Cardiovasc Sci, Leuven, Belgium

来源：

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) | 2021年

关键词：

Piezoelectric micromachined ultrasound transducer (pMUT); medical imaging; phased array; ultrasound;

D O I：

10.1109/IUS52206.2021.9593633

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A novel 128 elements pMUT-based phased array ultrasound transducer for medical imaging applications is described in this paper. The active area of the transducer has a dimension of 25.5 mm long by 9.7 mm wide. There are 6270 pMUTs in the transducer, with each pMUT having a membrane diameter of 160 mu m and a pitch between each two elements of 200 mu m. The transducer has a -6dB bandwidth of 18% with a center frequency of 6 MHz. The transducer benefits from a high transmission and receive sensitivity of 44 kPa/V/element @ 3 cm and 204 mV/MPa, respectively.

引用

页数：4

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