P-i-n CdTe 128-pixel detector for gamma-ray imaging fabricated by excimer laser processing

被引:9
|
作者
Aoki, T [1 ]
Nakamura, A [1 ]
Niraula, M [1 ]
Tomita, Y [1 ]
Hatanaka, Y [1 ]
机构
[1] Shizuoka Univ, Res Inst Elect, Oya, Shizuoka 422, Japan
关键词
CdTe; imaging detector; excimer laser; gamma-ray; low-temperature process;
D O I
10.1117/12.455777
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A 128-pixel gamma-ray imaging detector unit, which has high-energy resolution with room temperature operation, was fabricated by using diode-type CdTe detector. The diode structure was prepared by indium-doped n-type CdTe thin layer formed by excimer laser doping on one-side of high resistivity p-like single crystal CdTe wafer, and gold electrode as a Shottkey electrode evaporated on opposite side of the wafer. This diode-detectors showed good diode I-V characteristics with low leakage current. This CdTe detectors were pixelized in the 2mm x 2mm, and the 128 chips (32 x 4 chips) were mounted, on the ceramic printed circuit boards at 3mm interval with 1mm gap. The printed circuit boards are directly connected with the MCSA-EX1 ASIC chip and 128 ch radiation spectrum analyzer systems. When using the Am-241 and the Co-57 as radioisotopes, the spectral response from all pixels had within 4.4 keV of FWHM at 122 keV peak of Co-57 for radiation performed at room temperature. The intensities of the peak from pixels were also uniform.
引用
收藏
页码:259 / 268
页数:10
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