New developments and old problems in grid generation and adaptation for TCAD applications

We present several challenging gridding problems for multi-dimensional device and process simulation and discuss how new strategies might contribute to their solution. Formulating grid quality requirements for the standard Scharfetter-Gummel box method discretization in device simulation, we demonstrate how the offsetting techniques compares with quadtree grid generation methods and how they apply to modern device designs. Further we present a grid adaptation approach which respects the grid quality criteria and touch upon the main adaptation difficulties within device simulation. For the 3D moving boundary grids in process simulation we present a new algorithm.