Immersion lithography for 45nm manufacturing

被引：0
|
作者：
Owa, S.
Hazelton, A. [1 ]
Magoon, H.
机构：
[1] Nikon Inc, Tokyo, Japan
[2] Nikon Precis Inc, Essex Jct, VT USA
来源：
MICROLITHOGRAPHY WORLD | 2007年 / 16卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：4 / +
页数：4
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