Reliability of MEMS-based mass-flow controllers for semiconductor processing

被引：1

作者：

Lawrence, ED ^{[1
]}

Henning, AK ^{[1
]}

机构：

[1] Redwood Microsyst Inc, Menlo Pk, CA 94025 USA

来源：

41ST ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM | 2003年

关键词：

D O I：

10.1109/RELPHY.2003.1197795

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microfabricated components are finding increasing application in semiconductor processing. In this work, we report the results of detailed reliability and MTTF studies on mass-flow controllers (MFCs) created from silicon pressure sensors, microfabricated orifices for use in the flow sensor, and microvalves. Attributes studied include accuracy, response time, inboard leak rate, and particle generation, all monitored versus number of cycles. From these measurements, MTTF is calculated to be greater than 3M cycles. Failure modes are also discussed in detail.

引用

页码：478 / 483

页数：6

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