The creation of the narrow electron and ion beams for a modification of a surface in nanometric scale

被引：0
|
作者：
Golubev, OL [1 ]
Shrednik, VN [1 ]
机构：
[1] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
来源：
ISDEIV: XXITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, VOLS 1 AND 2, PROCEEDINGS | 2004年 / 21卷
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The methods of creation of the point sources of electrons and ions with localization of emission in a small angle based on field electron emission and field evaporation are considered. Examples of creation of such sources with use of emitters from pure metals, alloys and complex multicomponent compounds are given. Application of all described methods in a combination to a variety of materials of emitters enables to create a great set of the point sources of the charged particles with various properties.
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页码：48 / 50
页数：3
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