Axially symmetric electron beam trajectory simulation

被引：0

作者：

Ose, Y ^{[1
]}

Yoshinari, K

机构：

[1] Hitachi Ltd, Hitachinaka, Ibaraki 3128504, Japan

[2] Hitachi Ltd, Hitachi Res Lab, Hitachi, Ibaraki 3191221, Japan

来源：

JAPAN JOURNAL OF INDUSTRIAL AND APPLIED MATHEMATICS | 2000年 / 17卷 / 03期

关键词：

electron gun; simulation; electric field; beam trajectory; electron microscope;

D O I：

10.1007/BF03167372

中图分类号：

O29 [应用数学];

学科分类号：

070104 ;

摘要：

An axially symmetric simulator for the Schottky emission gun has been developed using the boundary-fitted coordinate transformation method. The domain decomposition method is successfully employed with multi-layer overlapping, which allows complicated electrode structures to be modeled and the electric potential computation to converge quickly. The angular intensity distribution of Swanson's Schottky emission gun is analyzed, and good agreement is seen with his experimental data. The simulation results show that angular intensity and virtual source size are remarkably dependent on the real emitter size.

引用

页码：357 / 370

页数：14

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