Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel

被引:0
|
作者
Hariharan, R. [1 ]
Raja, R. [2 ]
Nimal, R. J. Golden Renjith [3 ]
Refaai, Mohamad Reda A. [4 ]
Ravi, S. [5 ]
Allasi, Haiter Lenin [6 ]
机构
[1] Bharath Inst Higher Educ & Res, Dept Mech Engn, Chennai 73, Tamil Nadu, India
[2] VPMM Engn Coll Women, Srivilliputhur 626190, Tamil Nadu, India
[3] Jai Shriram Engn Coll, Dept Mech Engn, Tirupur 638660, Tamil Nadu, India
[4] Prince Sattam Bin Abdulaziz Univ, Coll Engn, Dept Mech Engn, Alkharj 16273, Saudi Arabia
[5] Chennai Inst Technol, Ctr Mat Res, Chennai 600069, Tamil Nadu, India
[6] Wollo Univ, Kombolcha Inst Technol, Dept Mech Engn, Kombolcha, Ethiopia
关键词
ZR-N COATINGS; THIN-FILMS; MECHANICAL-PROPERTIES; CORROSION BEHAVIOR; PHASE-COMPOSITION; VACUUM-ARC; NITROGEN; EVOLUTION;
D O I
10.1155/2021/8273708
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this present research work, TiZrN and TaZrN multilayer coating was deposited on 4140 steel by RF/DC magnetron sputtering for comparative work also prepared in single layer. The flow rate ratio of Ar/N2 was set to 15 : 3 sccm and the thin film was prepared by the PVD (physical vapor deposition) method by RF/DC magnetron using a Ti-Zr and Ta-Zr target with a purity of 99.99%. The crystal structure, surface morphology microstructure, and component arrangements were explored by X-ray diffraction (XRD), scanning electron microscope (SEM), and atomic force microscopy (AFM). It has been found that the crystal structure, surface morphology, microstructure, and elemental composition of the membrane are strongly dependent on deposition parameters. It is mechanically characterized by corrosion and Vickers hardness. In AFM measurements, coarse cluster particles with increasing Ti and Ta values not only increase the average roughness (Ra) by 2.341 nm (200 degrees C) and 2.951 nm (400 degrees C) but also have a continuous average thickness which was shown to increase by 1.504 nm and 781.75 nm. With the increase of hardness, the roughness decreases correspondingly. The TiZrN multilayer microhardness augmented to 314 GPa at 200 degrees C and 371 GPa for TaZrN (400 degrees C).
引用
收藏
页数:10
相关论文
共 45 条
  • [1] Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel
    Hariharan, R.
    Raja, R.
    Golden Renjith Nimal, R.J.
    Refaai, Mohamad Reda A.
    Ravi, S.
    Allasi, Haiter Lenin
    [J]. Advances in Materials Science and Engineering, 2021, 2021
  • [2] COATING CHARACTERIZATION IN CrN DEPOSITED BY MAGNETRON SPUTTERING METHOD ON AISI 316 STEEL
    Hilerio, I.
    Vite, M.
    Moreno, M.
    Barron, M. A.
    Jimenez, H.
    Vazquez, B.
    [J]. IMECE 2008: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 7, 2009, : 129 - 133
  • [3] COATING CHARACTERIZATION IN CrN DEPOSITED BY MAGNETRON SPUTTERING METHOD ON AISI 316 STEEL
    Hilerio, I.
    Vite, M.
    Moreno, M.
    Barron, M. A.
    [J]. EPD CONGRESS 2009, PROCEEDINGS, 2009, : 301 - +
  • [4] Tribological study of a mono and multilayer coating of TaZrN/TaZr produced by magnetron sputtering on AISI-316L stainless steel
    Hernandez-Navarro, C.
    Rivera, L. P.
    Flores-Martinez, M.
    Camps, E.
    Muhl, S.
    Garcia, E.
    [J]. TRIBOLOGY INTERNATIONAL, 2019, 131 : 288 - 298
  • [5] Chemical Composition Analysis of TiAlBN Nanocomposite Coating Deposited via RF Magnetron Sputtering
    Rosli, Z. M.
    Mahamud, Z.
    Kwan, W. L.
    Juoi, J. M.
    Lau, K. T.
    [J]. ADVANCED MATERIALS ENGINEERING AND TECHNOLOGY II, 2014, 594-595 : 551 - 555
  • [6] Characterization of Nanostructured TiZrN Thin Films Deposited by Reactive DC Magnetron Co-sputtering
    Chinsakolthanakorn, S.
    Buranawong, A.
    Witit-anun, N.
    Chaiyakun, S.
    Limsuwan, P.
    [J]. ISEEC, 2012, 32 : 571 - 576
  • [7] Analysis of the wear behavior of multilayer coatings of TaZrN/TaZr produced by magnetron sputtering on AISI-316L stainless steel
    Carolina Hernández Navarro
    Martín Flores Martínez
    Edgar Enrique Camps Carvajal
    Laura Patricia Rivera Reséndiz
    Ernesto David García Bustos
    [J]. The International Journal of Advanced Manufacturing Technology, 2021, 117 : 1565 - 1573
  • [8] Analysis of the wear behavior of multilayer coatings of TaZrN/TaZr produced by magnetron sputtering on AISI-316L stainless steel
    Hernandez Navarro, Carolina
    Flores Martinez, Martin
    Camps Carvajal, Edgar Enrique
    Rivera Resendiz, Laura Patricia
    Garcia Bustos, Ernesto David
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2021, 117 (5-6): : 1565 - 1573
  • [9] Influence of plasma nitriding treatment on the adhesion of DLC films deposited on AISI 4140 steel by PVD magnetron sputtering
    Kovaci, Halim
    Baran, Ozlem
    Bayrak, Ozgu
    Yetim, Ali Fatih
    Celik, Ayhan
    [J]. JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 2017, 31 (18) : 2015 - 2027
  • [10] Electrochemical Properties of TiWN/TiWC Multilayer Coatings Deposited by RF-Magnetron Sputtering on AISI 1060
    Gonzalez-Hernandez, Andres
    Morales-Cepeda, Ana Beatriz
    Flores, Martin
    Caicedo, Julio C.
    Aperador, William
    Amaya, Cesar
    [J]. COATINGS, 2021, 11 (07)