Low Pull-In Voltage Electrostatic MEMS Switch Using Liquid Dielectric

被引：0
|
作者：
Zidan, Mohammed Affan [1 ]
Kosel, Jurgen [1 ]
Salama, Khaled N. [1 ]
机构：
[1] King Abdullah Univ Sci & Technol, Elect Engn Program, Thuwal 239556900, Saudi Arabia
来源：
2014 IEEE 57TH INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS (MWSCAS) | 2014年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
引用
收藏
页码：169 / 172
页数：4
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