Micro-calorimetric sensor for vapor phase explosive detection with optimized heat profile

被引：15
|
作者：
Greve, A. [1 ]
Olsen, J. [1 ]
Privorotskaya, N. [2 ]
Senesac, L. [3 ]
Thundat, T. [3 ]
King, W. P. [2 ]
Boisen, A. [1 ]
机构：
[1] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
[2] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
[3] Oak Ridge Natl Lab, Div Life Sci, Oak Ridge, TN USA
来源：
MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 5-8期
关键词：
Calorimetry; Explosive detection; Micro-heater;
D O I：
10.1016/j.mee.2009.12.069
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A heater design, used in a micro-calorimetric sensor, has been optimized for temperature uniformity in order to increase the sensitivity and reliability of detection of trace amounts of explosives. In this abstract the design, fabrication and characterization is described. The performance of the novel heater design is characterized by measuring the temperature coefficient of resistivity (TCR) values and by mapping the temperature distribution using Raman spectroscopy. The new heater design is seen to have increased the temperature uniformity by a factor of 2.3. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：696 / 698
页数：3
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