Micro industry equipments

被引：1
|
作者：
Esashi, M
Ono, T
Tanaka, S
机构：
[1] Tohoku Univ, New Ind Creat Hatchery Ctr, Aoba Ku, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan
来源：
JSME INTERNATIONAL JOURNAL SERIES B-FLUIDS AND THERMAL ENGINEERING | 2004年 / 47卷 / 03期
关键词：
valve; flow control; energy conversion;
D O I：
10.1299/jsmeb.47.429
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
Advanced states of art of MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and micro energy source for self moving machines like robots, maintenance systems used in narrow spaces, components for multi-column electron beam lithography and multi-probe data storage, micro gas control systems, micro/nano mold, micro contactor and thermal RF relay for LSI testing and nano-instruments which performs high sensitivity and spatial resolution.
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页码：429 / 438
页数：10
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