Atomically-Thin MoS2 Resonators for Pressure Sensing

We describe the first experimental investigation of pressure-dependent resonant motions in high-frequency circular drumhead resonators based on atomically-thin molybdenum disulfide (MoS2), which demonstrate attractive performance and potential for pressure sensing. Circular bilayer and trilayer MoS2 membrane resonators with diameter of similar to 1.8 mu m are studied in the pressure range of similar to 10mTorr to similar to 400Torr. We observe frequency shifts due to membrane bulging, tensioning, and squeeze-film effects with varying pressure. We find very high pressure responsivity of resonance frequency of similar to 0.77MHz/Torr, similar to 0.043MHz/Torr, and similar to 0.21MHz/Torr, in different pressure regimes. These results show that MoS2 membrane resonators are exceptional for pressure sensing in a wide pressure range.