Fabrication of Micro Structure Surface by Etching Method

被引：0
|
作者：
Hattori, Tadashi [1 ]
机构：
[1] Univ Hyogo, Lab Adv Sci & Technol Ind, Kamigori, Hyogo 6781205, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2010年 / 55卷 / 02期
关键词：
MEMS (micro electro mechanical systems); LIGA process; 3 D microfabrication; micro machining; etching; grating; lighting panel;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：83 / 88
页数：6
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