X-ray microanalysis of Al/Zr multilayers in the transmission electron microscope

A one-nanometer scale transmission electron microscope electron probe X-ray microanalysis characterisation of as-deposited and annealed aluminum - 11.5 at.% zirconium multilayer samples in cross-section synthesized by magnetron sputtering is reported on here. Composition line profiles were acquired across Zr layers in as-deposited material and samples isochronnally annealed in a differential scanning calorimeter to temperatures of 290 degrees C and 485 degrees C. A spatial resolution of approximaty 1.5 to 3.0 nm was achieved in these experiments and will be improved by deconvolution of the instrumental electron probe function from the data. The as-deposited structure consisted of crystalline Al and Zr layers with thin amorphous layers at the Al/Zr interfaces. The amorphous interface layers increased in thickness upon annealing to 290 degrees C. Additionally, at 390 degrees C a metastable cubic alloy forms at the Zr deposited on Al interface. Upon heating to 485 degrees C a multilayer of Al and metastable cubic AlxZr1-x phase is formed. The electron microscopic experimental technique, observations and data analysis will be discussed as applied to these multilayered materials.