Highly precise in-plane displacement sensor based on an asymmetric fiber Fabry-Perot interferometer

被引：11

作者：

Wang, Zihao ^{[1
,2
,3
]}

Xu, Zhilin ^{[1
,2
,3
]}

Chen, Liuyang ^{[1
,2
,3
]}

Shi, Yi ^{[1
,2
,3
]}

Wang, Xiaoyun ^{[1
,2
,3
]}

Wu, Junhui ^{[1
,2
,3
]}

Fan, Ji ^{[1
,2
,3
]}

Tu, Liangcheng ^{[1
,2
,3
,4
,5
]}

机构：

[1] Huazhong Univ Sci & Technol, MOE Key Lab Fundamental Phys Quant Measurement, Wuhan 430074, Peoples R China

[2] Huazhong Univ Sci & Technol, Hubei Key Lab Gravitat & Quantum Phys, PGMF, Wuhan 430074, Peoples R China

[3] Huazhong Univ Sci & Technol, Sch Phys, Wuhan 430074, Peoples R China

[4] Sun Yat Sen Univ, TianQin Res Ctr Gravitat Phys, MOE Key Lab TianQin Mission, Zhuhai Campus, Zhuhai 519082, Peoples R China

[5] Sun Yat Sen Univ, Sch Phys & Astron, Frontiers Sci Ctr TianQin, CNSA Res Ctr Gravitat Waves, Zhuhai Campus, Zhuhai 519082, Peoples R China

来源：

OPTICS LETTERS | 2021年 / 46卷 / 16期

基金：

中国国家自然科学基金;

关键词：

CAVITY;

D O I：

10.1364/OL.430389

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An in-plane displacement sensor based on an asymmetric extrinsic fiber Fabry-Perot interferometer (EFPI) is proposed and demonstrated. The asymmetric EFPI composed of a step-shaped external reflector and a cleaved fiber end face can be equivalent to two parallel FPIs with slightly different cavity lengths. By calculating the peak intensity difference of the two FPIs, the in-plane displacement can be demodulated with enhanced sensitivity and suppressed common mode noise. Both theoretical analyses and experimental results show that the sensitivity and the linear range of the in-plane displacement sensor are dependent on the cavity length. A displacement resolution of 5 nm and a linear range of +/- 7 mu m under the cavity length of 250 mu m are achieved in the experiment. The proposed in-plane displacement sensor with a nanometric resolution and compact size can be widely used in the fields of metrology, accelerometers, and semiconductor manufacture. (C) 2021 Optical Society of America

引用

页码：3945 / 3948

页数：4

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