共 50 条
- [1] Design of production chemical vapor deposition equipment International Journal of Refractory Metals and Hard Materials, 14 (1-3 SPEC. ISS.): : 161 - 165
- [3] Design of Cooling Water Temperature Control System for Microwave Plasma Chemical Vapor Deposition Equipment 2020 5TH INTERNATIONAL CONFERENCE ON MECHANICAL, CONTROL AND COMPUTER ENGINEERING (ICMCCE 2020), 2020, : 862 - 865
- [4] Three-dimensional equipment modeling for chemical vapor deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1147 - 1151
- [5] Laser chemical vapor deposition for microelectronics production 1998 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 1, 1998, : 377 - 382
- [6] PRECURSOR DESIGN FOR CHEMICAL VAPOR-DEPOSITION ACTA CHEMICA SCANDINAVICA, 1991, 45 (08): : 864 - 869
- [7] Some recent developments in chemical vapor deposition process and equipment modeling JOURNAL DE PHYSIQUE IV, 1999, 9 (P8): : 117 - 132
- [8] Some recent developments in chemical vapor deposition process and equipment modeling Journal De Physique. IV : JP, 1999, 9 pt 1 (08): : 8 - 117
- [9] DESIGN AND MODELING OF CHEMICAL VAPOR-DEPOSITION REACTORS PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1992, 24 (02): : 111 - 211
- [10] MICRO CHEMICAL VAPOR DEPOSITION SYSTEM: DESIGN AND VERIFICATION IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, : 72 - 75