The intermediary service industry of science and technology, which is taken as the important part of the national innovation system, has established the close relationship with each kind of innovation subject and production elements market. It plays an irreplaceably crucial role in reducing the scientific innovation risk and accelerating the transformation of the scientific and advancements. Along with development of the intermediary service market of science and technology, the low service quality of the intermediary service of science and technology has already become an important bottleneck which restricts its development. Based on literature review, this paper constructs the perceived service quality measurement scale for the intermediary service industry of science and technology, and explores the 5 factors of intermediary service industry of science and technology's perceived service quality through the empirical research, including basic service ability, professional technology level, infrastructural facilities level, service extension ability and enterprise creditworthiness.