AN ULTRASENSITIVE HUMIDITY SENSOR BASED ON SnO2-MODIFIED MoS2 NANOCOMPOSITE AT LOW-HUMIDITY RANGE

被引：0
|
作者：
Zhao, Yalei [1 ]
Yang, Bin [1 ]
Liu, Jingquan [1 ]
Chen, Xiang [1 ]
Wang, Xiaolin [1 ]
Yang, Chunsheng [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai, Peoples R China
来源：
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年
基金：
中国国家自然科学基金;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports an ultrasensitive capacitive humidity sensor for low-humidity detecting environment, which employs SnO2-modified MoS2 (SnO2/MoS2) hybrid nanocomposite film as sensing layer and interdigital electrodes with narrow gap of 15 mu m on sapphire substrate. The testing results show that the sensor of SnO2/MoS2 (10: 1) composite has the best sensitivity of 387.5 mu F/%RH at the humidity range of 0-20% relative humidity (RH). To our best knowledge, this sensitivity value is higher than that of all reported humidity sensors at low-humidity range. Moreover, the humidity sensor also has fast response (15s), little hysteresis and good repeatability.
引用
收藏
页码：912 / 915
页数：4
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