Interdiffusion in MnIr/NiFe exchange biased layer annealed above 300°C in the pinned electrode of a magnetic tunnel junction

被引:4
|
作者
Yoon, CS [1 ]
Lee, JH [1 ]
Kim, CK [1 ]
机构
[1] Hanyang Univ, Dept Mat Sci & Engn, Seoul 133791, South Korea
关键词
D O I
10.1063/1.1565497
中图分类号
O59 [应用物理学];
学科分类号
摘要
The thermal stability of the MnIr/NiFe exchange couple in the pinned electrode of a magnetic tunnel junction was analyzed using Auger electron spectroscopy (AES) and x-ray photoelectron microscopy (XPS). When the Ta/AlOx/CoFe/MnIr/NiFe/Ta/SiO2/Si electrode was annealed at 350 degreesC, the magnetic properties of the electrode quickly deteriorated. AES analysis indicated that there was a large diffusion of Ni into the MnIr layer accompanied by Ir migration into the NiFe layer above 350 degreesC. XPS of the annealed electrode revealed that the massive migration of Ni resulted in formation of antiferromagnetic NixMn1-x within the MnIr layer. The presence of the AlOx tunnel barrier, which promoted the preferential migration of Mn, appears to be the cause of the massive migration of Ni through formation of vacancies in the MnIr lattice. (C) 2003 American Institute of Physics.
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页码:8910 / 8913
页数:4
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