Transparent and Flexible Resistive Random Access Memory Based on Al2O3 Film With Multilayer Electrodes

被引:30
|
作者
Kim, Myeongcheol [1 ]
Choi, Kyung Cheol [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Sch Elect Engn, Daejeon 305701, South Korea
基金
新加坡国家研究基金会;
关键词
Flexible; memory; multilayer electrode; resistive; transparent; RRAM;
D O I
10.1109/TED.2017.2716831
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a transparent and flexible resistive random access memory (ReRAM) using a multi-thin-layer electrode. The transparent and flexible ReRAM includes a multi-thin-layerelectrodethat is transparentand flexible and an Al2O3 layer as a transparent oxide material. When the multi-thin-layer electrode is used for the top and bottom electrode for the ReRAM, the ReRAM has transparent and flexible properties. The stable memory operation uses a Ti layer and an MgO layer between the Al2O3 layer andmultithin- layer electrodes. The transmittance of the ReRAM is over 70% at a visible wavelength on a PET substrate. We believe this transparent and flexible ReRAM will be useful for transparent and flexible electronic devices in the future.
引用
收藏
页码:3508 / 3510
页数:3
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