Mechanical properties of amorphous and crystalline CrN/CrAlSiN multilayer coating fabricated using HPPMS

被引：18
|
作者：
Chang, Chi-Lung [1 ,2 ]
Huang, Chun-Hong [1 ]
Lin, Ching-Yen [1 ]
Yang, Fu-Chi [2 ]
Tang, Jian-Fu [3 ]
机构：
[1] Ming Chi Univ Technol, Dept Mat Engn, New Taipei City, Taiwan
[2] Ming Chi Univ Technol, Ctr Plasma & Thin Film Technol, New Taipei City, Taiwan
[3] Natl Taipei Univ Technol, Dept Electro Opt Engn, Taipei City, Taiwan
来源：
SURFACES AND INTERFACES | 2022年 / 31卷
关键词：
HPPMS; Nitrogen flow; Multilayer coatings; Amorphous; Bipolar; AR/N-2 FLOW RATIO; WORK TOOL STEELS; TRIBOLOGICAL PROPERTIES; HIGH-TEMPERATURE; CRALN COATINGS; GRAIN-SIZE; CRN; ALCRN; MICROSTRUCTURE; RESISTANCE;
D O I：
10.1016/j.surfin.2022.102064
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this study, CrN/CrAlSiN multilayer coatings were prepared on Si wafer, high-speed steel and 304 stainless steel substrates via high-power pulsed magnetron sputtering with targets of metallurgical Cr30Al60Si10 and Cr. The structural characteristics of the coatings were modulated by performing deposition under a fixed rotation speed while varying the nitrogen-argon flow ratio. FE-SEM revealed that increasing the nitrogen content decreased the grain size and thickness of the coatings. GIXRD analysis revealed that the crystallinity of the multilayer changed from an amorphous phase to crystalline structures as a function of N2 gas flow conditions. Improvements were exhibited in the hardness (from 13.3 to 26.8 GPa) and Young's modulus (from 261 to 402.2 GPa) with a period of modulation of 12 nm and crystal transformations. The adhesion strength of the multilayer improved from 17.2 to 66.6 N.
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页数：8
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