Effect of in-plane ordering on dielectric properties of highly {111}-oriented bismuth-zinc-niobate thin films

被引:10
|
作者
Le Febvrier, A. [1 ,3 ]
Deputier, S. [1 ]
Demange, V. [1 ]
Bouquet, V. [1 ]
Galca, A. C. [2 ]
Iuga, A. [2 ]
Pintilie, L. [2 ]
Guilloux-Viry, M. [1 ]
机构
[1] Univ Rennes 1, CNRS, UMR 6226, Inst Sci Chim Rennes, Campus Beaulieu, F-35042 Rennes, France
[2] Natl Inst Mat Phys, Atomistilor 405A, Magurele 077125, Ilfov, Romania
[3] Linkoping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Grp, S-58183 Linkoping, Sweden
关键词
PULSED-LASER DEPOSITION; SOLID-SOLUTIONS; PYROCHLORE; THICKNESS; SAPPHIRE; DEPENDENCE; SUBSTRATE;
D O I
10.1007/s10853-017-1297-x
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bi1.5-xZn0.92-yNb1.5O6.92-delta (BZN) thin films were grown by pulsed laser deposition on two different Pt-covered substrates, namely textured {111} Pt/TiO2/SiO2/(100) Si substrate (Pt/Si) and epitaxial {111} Pt/R-plane sapphire substrate (Pt/sapphire). In both cases, the BZN films present {111} and {100} out-of-plane orientations, in relative ratios of 65: 35 on Pt/Si and 80: 20 on Pt/sapphire, respectively. The film grown on Pt/Si is textured, while the film deposited on Pt/sapphire presents epitaxial-like relationships with the substrate, for both out-of-plane orientations. Dielectric measurements were taken on both types of thin films, using Pt/BZN/Pt planar capacitor structures. The BZN/Pt/sapphire film presents higher dielectric constant (245 at 100 kHz) and higher tunability (12% at 600 kV/cm) than the BZN/Pt/Si film (200; 6%), while the dielectric losses values are nearly same (similar to 0.05).
引用
收藏
页码:11306 / 11313
页数:8
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