Design and Simulation of an Electret-based Energy Harvesting Device

被引:0
|
作者
Maheshwari, Aishwarya [1 ]
Bhatia, Deepak [1 ]
机构
[1] Rajasthan Tech Univ, Dept Elect Engn, Kota 324010, India
关键词
MEMS; Electrets; Cantilever; Proof mass; Harvester; GENERATOR;
D O I
10.1109/ICMETE.2016.25
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a vibration based energy harvester using stepped MEMS cantilevers. Electrets are introduced with stepped cantilever beams to store the maximum charge hence maximum voltage can be achieved at output. The enhanced value of displacement in the order of millimeters has been achieved by using the proof mass with this structure. The output voltage has been increased up to 9.18V. This energy harvester is able to overcome the battery related issues. Displacement is measured for different applied pressures and various eigen frequencies. Simulation is carried out using COMSOL multiphysics.
引用
收藏
页码:28 / 31
页数:4
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