Synthesis and characterisation of YBCO thin films grown by injection-MOCVD

被引:18
|
作者
Senateur, JP
Felten, F
Pignard, S
Weiss, F
Abrutis, A
Bigelyte, V
Teiserskis, A
Saltyte, Z
Vengalis, B
机构
[1] VILNIUS STATE UNIV, LT-2006 VILNIUS, LITHUANIA
[2] INST SEMICOND PHYS, LT-2600 VILNIUS, LITHUANIA
关键词
injection MOCVD; superconduction;
D O I
10.1016/S0925-8388(96)02699-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Epitaxial YBCO thin films have been grown on MgO, SrTiO3 and NdGaO3 substrates by a new process (injection MOCVD). Droplets (few mu l) of a solution of Y, Ba and Cu beta-diketonates in monoglyme are injected into an evaporator through a fast micro electro-valve driven by a computer. Growth rates mon than ten times higher than those obtained by the conventional MOCVD process have been obtained in this first step of experiments (>3 mu m h(-1)). The best films obtained so far have T-c>90 K and J(c)>3x10(6) A cm(-2).
引用
收藏
页码:288 / 291
页数:4
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