X-ray photoelectron spectroscopy using hard X-rays

被引:50
|
作者
Kover, Laszlo [1 ]
机构
[1] Hungarian Acad Sci, Inst Nucl Res, H-4026 Debrecen, Hungary
关键词
X-ray photoelectron spectroscopy; Hard X-ray excitation; Surface/interface chemical analysis; Buried interfaces; Bulk electronic structure of solids; MEAN FREE PATHS; ANGULAR-DISTRIBUTION PARAMETERS; ELECTRON-ENERGY-LOSS; KLL AUGER-SPECTRA; EFFECTIVE ATTENUATION LENGTHS; RANGE; 100-5000; EV; ELASTIC-SCATTERING; EXTRINSIC EXCITATIONS; QUANTITATIVE-ANALYSIS; PLASMON EXCITATION;
D O I
10.1016/j.elspec.2009.12.004
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Hard X-ray photoelectron spectroscopy (HAXPES or HXPS), using hard (2-15 keV) X-rays for excitation and high energy resolution, has shown a spectacular development recently, clue to its capability for providing an insight into the bulk electronic structure of solids and the chemical composition of buried layers and interfaces lying at depths of several tens of nm. Following a summary of fundamentals concerning photoionization phenomena and transport processes of photoelectrons induced by hard X-rays from solids, examples of core level and valence band HAXPES spectra are presented to illustrate different physical effects. Examples are given of applications of HAXPES in determining electronic structure properties and in surface/interface chemical analysis of material systems of high practical interest. Finally, some perspectives for further developments are outlined. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:241 / 257
页数:17
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