Dimensional metrology for components of microsystem technology

被引：1
|
作者：
Brand, U [1 ]
Büttgenbach, S [1 ]
机构：
[1] PTB, Arbeitsgrp Mikrosyst Messtech, D-38116 Braunschweig, Germany
来源：
TECHNISCHES MESSEN | 2002年 / 69卷 / 12期
关键词：
microsystem technology; micro structures; 3d-micro measuring device; fibre probe; 3d-micro probe; micro force metrology;
D O I：
10.1524/teme.2002.69.12.542
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The increasing industrial use of microtechnical products has led to a strong demand of suitable dimensional measuring techniques. The present contribution describes the properties and potential applications of a novel 3D micro measuring system and appropriate micro probing systems which are available or under development. The micro force measuring technique used to characterize these probing systems is described.
引用
收藏
页码：542 / 549
页数：8
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