Modeling of Low Temperature Plasma for Surface and Airborne Decontamination

被引：2

作者：

Mihailova, Diana ^{[1
,2
]}

van Dijk, Jan ^{[1
]}

Hagelaar, Gerardus ^{[2
]}

Belenguer, Philippe ^{[2
]}

Guillot, Phillipe ^{[3
]}

机构：

[1] Univ Toulouse, Lab Plasma & Convers Energie, Ctr Natl Rech Sci, F-31555 Toulouse, France

[2] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

[3] Ctr Univ Jean Francois Champollion, F-81000 Champollion, Albi, France

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2014年 / 42卷 / 10期

关键词：

Plasma applications; plasma cleaning; plasma modelling; plasma simulation; plasmas; plasma-surface interaction;

D O I：

10.1109/TPS.2014.2352492

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

This paper aims to study and develop new plasma-based technology for the next generation of molecular decontamination systems. A capacitively coupled plasma is considered for cleaning using the plasma fluxes directed to the walls. The model used for this purpose is the PLASIMO fluid module applied to a simplified 2-D geometry with pure argon gas. The modeling results are validated by comparison with experimental results and observations. Images of the plasma in the reactor and images of the calculated species distribution are presented.

引用

页码：2760 / 2761

页数：2

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