Magnetic Levitation as a Micromanipulation Technique for MEMS

被引：5

作者：

Elbuken, Caglar ^{[1
]}

Khamesee, M. Behrad ^{[1
]}

Yavuz, Mustafa ^{[1
]}

机构：

[1] Univ Waterloo, Dept Mech & Mechatron Engn, Waterloo, ON N2L 3G1, Canada

来源：

2009 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS 1-7, CONFERENCE PROCEEDINGS | 2009年

关键词：

Magnetic levitation; micromanipulation; microrobot; microgripper; MICRO AIR VEHICLE; FABRICATION; DESIGN; MODELS; MACRO;

D O I：

10.1109/ICMA.2009.5246364

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A new micromanipulation technique is demonstrated using magnetic levitation. Millimeter-size microrobots are levitated and controlled in a volume of 3 x 3 x 2 cm(3). A photothermal SU-8 microgripper was attached to the microrobot for manipulation operations. The motion of the microrobot is tested for automatic and manual trajectories and an rms accuracy of 13.2 mu m is obtained. The microrobot is used for pick-andplace of a 125 mu m diameter fiber optic cable. This non-contact positioning technique eliminates the problems associated with complex surface forces, thus provides repeatable operation. The use of magnetic fields allows dust-free operation which can be applied for manipulation of micro-mechanical and biological samples.

引用

页码：955 / 959

页数：5

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