Surface, structural and optical properties of sol-gel derived HfO2 films

被引：95
|
作者：
Nishide, T [1 ]
Honda, S
Matsuura, M
Ide, M
机构：
[1] Nihon Univ, Coll Engn, Dept Ind Chem, Koriyama, Fukushima 9638642, Japan
[2] Nissan ARC Ltd, Kanagawa 2370061, Japan
[3] Yokohama City Ctr Ind Technol & Design, Kanazawa Ku, Yokohama, Kanagawa 236, Japan
来源：
THIN SOLID FILMS | 2000年 / 371卷 / 1-2期
关键词：
hafnium; X-ray diffraction; optical properties; surface and interface states;
D O I：
10.1016/S0040-6090(00)01010-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The surface, structural and optical properties of sol-gel derived HfO2 films have been investigated. The water droplet contact angles reached constant values between 80 and 100 degrees after the films were left for 1-4 days in air at ambient temperature, indicating that the film surface exhibited hydrophobicity. Hydrophobicity was maintained even after the films were treated with organic solvents. Scanning electron microscopy and atomic force microscopy observation showed that the film surface was smooth and uniform. The HfO2 in the films crystallized to the monoclinic phase at firing temperatures between 500 and 550 degrees C and no other phases were observed to 900 degrees C. The refractive index and optical gap of the films were 1.88-1.93 and 5.1 eV, respectively. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：61 / 65
页数：5
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