Ultra-thin membrane EPL masks

被引：0

作者：

Greschner, J ^{[1
]}

Bayer, T ^{[1
]}

Kalt, S ^{[1
]}

Weiss, H ^{[1
]}

Reu, PL ^{[1
]}

Engelstad, RL ^{[1
]}

Wood, OR ^{[1
]}

Thiel, C ^{[1
]}

Gordon, M ^{[1
]}

Dhaliwal, R ^{[1
]}

Robinson, C ^{[1
]}

Pfeiffer, HC ^{[1
]}

机构：

[1] Team Nanotec GmbH, Villingen Schwenningen, Germany

来源：

19TH EUROPEAN CONFERENCE ON MASK TECHNOLOGY FOR INTEGRATED CIRCUITS AND MICROCOMPONENTS | 2003年 / 5148卷

关键词：

D O I：

10.1117/12.515090

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：218 / 219

页数：2

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