Temperature and humidity sensor based on MEMS technology

被引：6

作者：

Zhao, Dongyan ^{[1
]}

Wang, Yubo ^{[1
]}

Shao, Jin ^{[1
]}

Zhang, Peng ^{[1
]}

Chen, Yanning ^{[1
,2
]}

Fu, Zhen ^{[1
,2
]}

Wang, Shuaipeng ^{[1
,2
]}

Zhao, Wenlong ^{[1
]}

Zhou, Zhimei ^{[1
,3
]}

Yuan, Yuandong ^{[1
,2
]}

Fu, Dengyuan ^{[4
]}

Zhu, Yinfang ^{[4
]}

机构：

[1] Beijing Smart Chip Microelect Technol Co Ltd, Natl & Local Joint Engn Res Ctr Reliabil Technol, Beijing 100192, Peoples R China

[2] Beijing Chip Identificat Technol Co Ltd, Beijing 102200, Peoples R China

[3] Smart Shine Microelect Technol Co Ltd, Qingdao 266300, Peoples R China

[4] Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China

来源：

AIP ADVANCES | 2021年 / 11卷 / 08期

关键词：

MEMS - Monolithic integrated circuits - Microelectromechanical devices - Temperature sensors - Capacitive sensors;

D O I：

10.1063/5.0053342

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the "bi-metallic" effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a polyimide parallel plate capacitive structure with the microporous array on the upper electrode designed for high sensitivity and fast response. Numerical analysis and COMSOL simulation showed that the temperature detection sensitivity is 0.2 mV/degrees C in the range of 193-393 K and humidity sensitivity is 0.405 pF/% relative humidity (RH) with the response time of 34 s in the humidity range of 0%-100% RH. The integrated temperature and humidity sensor has the advantages of small dimension, wide detection range, high precision, and fast response.

引用

页数：8

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