High-precision control of X-Y table using experimental evolutionary programming-based scheme

被引:0
|
作者
Jeon, HY [1 ]
Kim, JH [1 ]
Koh, K [1 ]
机构
[1] KOREA ADV INST SCI & TECHNOL,DEPT EE,TAEJON 305701,SOUTH KOREA
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TP [自动化技术、计算机技术];
学科分类号
0812 ;
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页码:2258 / 2263
页数:6
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