Optical readout method for microcantilever array sensing and its sensitivity analysis

被引：23
|
作者：
Miao, Zhengyu
Zhang, Qingchuan [1 ]
Guo, Zheying
Wu, Xiaoping
Chen, Dapeng
机构：
[1] Univ Sci & Technol China, Key Lab Mech Behav & Design Mat, Chinese Acad Sci, Hefei 230027, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
来源：
OPTICS LETTERS | 2007年 / 32卷 / 06期
关键词：
D O I：
10.1364/OL.32.000594
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An optical readout platform using a knife-edge filter for detecting the bending of a bimaterial microcantilever array is established, and the influence of stress-induced micromirror deformation on the optical detection sensitivity is discussed. The influence of deformation is modeled theoretically and validated experimentally. Analysis shows that the optical detection sensitivity will decrease by 50% when the mirror has a deformation of lambda/5 (lambda is the wavelength of readout light). Finally, an infrared image is obtained by the platform. (c) 2007 Optical Society of America
引用
收藏
页码：594 / 596
页数：3
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