Annealing Time Effect on Metal Graphene Contact Properties

被引:7
|
作者
Sakavicius, Andrius [1 ]
Astromskas, Gvidas [1 ]
Luksa, Algimantas [1 ]
Bukauskas, Virginijus [1 ]
Nargeliene, Viktorija [1 ]
Matulaitiene, Ieva [1 ]
Setkus, Arunas [1 ]
机构
[1] Ctr Phys Sci & Technol, LT-10257 Vilnius, Lithuania
关键词
RESISTANCE;
D O I
10.1149/2.0201805jss
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Annealing is well known technique to improve metal contacts. In order to anneal metal/graphene contacts information of suitable time of thermal treatment process is required, otherwise in a long annealing process undesired deformation in graphene layer or electronic device can be induced. In this article we introduce the investigation of the annealing time of metal/graphene structure. Electrical properties of contact between CVD grown graphene and metal (Au and Ni), using circular transmission line model (CTLM) contact geometry is observed. Raman spectroscopy is applied for characterization aiming to clarify surface and interface properties. It is found that the effective contact formation occur after 4 min annealing. The increase of thermal treatment time leads to unwished effects in graphene layers. (C) 2018 The Electrochemical Society.
引用
收藏
页码:M77 / M81
页数:5
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