Molecular dynamics simulation of impurities in nanocrystalline diamond grain boundaries

被引:0
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作者
Sternberg, M [1 ]
Zapol, P [1 ]
Frauenheim, T [1 ]
Gruen, DM [1 ]
Curtiss, LA [1 ]
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[1] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
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T [工业技术];
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08 ;
摘要
Nanocrystalline diamond films grown on Si substrates at 800 degrees C from hydrogen-poor ;plasmas have a number of highly desirable mechanical and electronic properties. Impurities were found by SIMS measurements to be uniformly distributed throughout the thickness of the films at a level of 10(17) - 10(18) cm(-3). It is likely that the impurities are located at the grain boundaries, which play a crucial role in controlling important characteristics of the films, such as electrical conductivity and electron emission. Density-functional based tight-binding (DFTB) molecular dynamics simulations were performed for diamond high-energy high-angle (100) twist grain boundaries with impurities such as N, Si and H.
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页码:483 / 487
页数:5
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