Physical and technological features of the arc vacuum system for coatings deposition based on the plasma arc accelerator

被引：0
|
作者：
Semenyuk, V [1 ]
Osipov, L [1 ]
Svavilnyi, N [1 ]
Chernolutskiy, D [1 ]
Gurin, A [1 ]
机构：
[1] INTRA LTD,DESIGN ENGN ENTERPRISE,UA-252022 KIEV,UKRAINE
来源：
ISDEIV - XVIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, VOLS I AND II | 1996年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：871 / 875
页数：5
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