Detonation-Induced Implantation of Microparticles into a Substrate

The concept of using the waves generated by gaseous fuel detonation for microparticles acceleration during their implantation onto a solid substrate is analyzed. The dynamics of microparticles of the 1.0. 100 mu m size has been numerically simulated in a flow behind the shock wave, which is formed as a result of detonation-wave flowing out from a channel into a chemically neutral gas and then interacts with a substrate situated at some distance from the channel exit. It is established that the efficiency of implantation by a detonation-wave impulse decreases for microparticles with sizes on the order of or below 10 mu m (4-15 mu g). Based on detailed analysis of the implantation-process dynamics, it is proposed to use profiled substrates for increasing the efficiency of implantation of small particles.