Magnetic Sensors Based on Micromechanical Oscillators

被引：0
|
作者：
Li, M. [1 ]
Rouf, V. T. [1 ]
Sonmezoglu, S. [1 ]
Horsley, D. A. [1 ]
机构：
[1] Univ Calif Davis, BSAC, Davis, CA 95616 USA
来源：
2014 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS) | 2014年
关键词：
MEMS; oscillators; magnetic sensors; Lorentz force; FIELD SENSOR; COMPASS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes magnetic sensor technology based on the detection of Lorentz force on a micromechanical oscillator. Experimental results are presented based on a silicon resonator operating at 105.5 kHz with a quality factor of 13,000. Sensor operation is demonstrated using amplitude modulation (AM) and frequency modulation (FM) readout of the magnetic signal. In AM operation, the noise at the sensor's output is equivalent to 128 nT/rt-Hz and the bandwidth is 4 Hz. In FM operation, the noise at the sensor's output is equivalent to 500 nT/rt-Hz and the bandwidth is 50 Hz.
引用
收藏
页码：261 / 263
页数：3
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