Output blue light evaluation for phosphor based smart white LED wafer level packages

被引：9

作者：

Kolahdouz, Zahra ^{[1
]}

Rostamian, Ali ^{[2
]}

Kolahdouz, Mohammadreza ^{[2
]}

Ma, Teng ^{[1
]}

van Zeijl, Henk ^{[1
]}

Zhang, Kouchi ^{[1
]}

机构：

[1] Delft Univ Technol, Delft Inst Microsyst & Nanoelect DIMES, Delft, Netherlands

[2] Univ Tehran, Thin Film Lab & Nanoelect, Dept Elect & Comp Engn, Tehran, Iran

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 04期

关键词：

PHOTODIODE;

D O I：

10.1364/OE.24.003216

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This study presents a blue light detector for evaluating the output light of phosphor based white LED package. It is composed of a silicon stripe-shaped photodiode designed and implemented in a 2 mu m BiCMOS process which can be used for wafer level integration of different passive and active devices all in just 5 lithography steps. The final device shows a high selectivity to blue light. The maximum responsivity at 480nm is matched with the target blue LED illumination. The designed structure have better responsivity compared to simple photodiode structure due to reducing the effect of dead layer formation close to the surface because of implantation. It has also a two-fold increase in the responsivity and quantum efficiency compared to previously similar published sensors. (C) 2016 Optical Society of America

引用

页码：3216 / 3229

页数：14

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