Etching-free high-throughput intersectional nanofabrication of diverse optical nanoantennas for nanoscale light manipulation

The capabilities to manipulate light-matter interaction at the nanoscale lie at the core of many promising photonic applications. Optical nanoantennas, made of metallic or dielectric materials, have seen a rapid development for their remarkable optical properties facilitating the coupling of electromagnetic waves with subwavelength entities. However, high-throughput and cost-effective fabrication of these nanoantennas is still a daunting challenge. In this work, we provide a versatile nanofabrication method capable of producing large scale optical nanoantennas with different shapes. It is developed from colloidal lithography with no dry etching required. Furthermore, both metallic and all-dielectric nanoantennas can be readily fabrication in a high-throughput fashion. Au and Si nanodisks were fabricated and employed to assemble heterostructures with monolayer tungsten disulfide. Strong coupling is observed in both systems between plasmon modes (Au nanodisks) or anapole modes (Si nanodisks) with excitons. We believe that this nanofabrication method could find a wide range of applications with the diverse optical nanoantennas it can engineer. (C) 2022 Elsevier Inc. All rights reserved.