Theoretical investigation of performance in uniaxially- and biaxially-strained Si, SiGe and Ge double-gate p-MOSFETs

被引:0
|
作者
Krishnamohan, Tejas [1 ,4 ]
Jungernann, Christoph [2 ]
Kim, Donghyan [1 ]
Ungersboeck, Enzo [3 ]
Selberherr, Siegfried [3 ]
Wong, Philip [1 ]
Nishi, Yoshio [1 ]
Saraswat, Krishna [1 ]
机构
[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[2] Univ Armed Forces, Munich, Germany
[3] TU Wien, Inst Microelect, Vienna, Austria
[4] Intel Corp, Santa Clara, CA 95054 USA
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using the Non-local Empirical Pseudopotential method (bandstructure), Full-Band Monte-Carlo Simulations (transport), I-D Poisson-Schrodinger (electrostatics) and detailed Band-To-Band-Tunneling (BTBT) (including bandstructure and quanturn effects) simulations, the effect of uniaxial- and biaxial-strain, band-structure, mobility, effective masses, density of states, channel orientation and high-field transport on the drive current, off-state leakage and switching delay in nano-scale, Si, SiGe and Ge, p-MOS DGFETs is thoroughly and systematically investigated.
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页码:681 / +
页数:3
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