On Switching Control Design for Rigid-Flexible Coupling Motion Stage

With the development of electronics manufacturing, high-precision stage needs to meet the growing demand for performance. A novel structure, rigid-flexible coupling motion stage is featured with high control performance under different working conditions. On the other hand, to dynamic characteristics is changeable in the process of stage motion, such that the controller is needed to accommodate changes. In order to give full play of the stage performance, a switch control strategy is designed in this paper. By judging whether the dynamic characteristics of the system have changed, switching control strategy with proportional/proportional-integral (P/PI) controllers, called segmented P/PI controllers, is carried out on the stage. Experimental results indicate that, compared to the single P/PI controller, the setting time of using segmented P/PI controllers reduces drastically and the superior positioning accuracy can be maintained.